TY  - GEN
AU  - Lobontiu, Nicolae
AU  - Garcia, Ephrahim
TI  - Mechanics of Microelectromechanical Systems
SN  - 9788181288493
U1  - 621.381 LOB 
PY  - 2005///
CY  - New York
PB  - KAP
KW  - Microelectromechanical
ER  -